Diffusion tubes, typically used in the semiconductor and photovoltaic industries, are high-temperature reactors mainly used for diffusion and oxidation processes. Here are the basic characteristics of diffusion tubes:
- Material: Made from high-purity quartz to ensure chemical stability and purity at high temperatures.
- High Temperature Resistance: Capable of withstanding extremely high operating temperatures, generally between 1000°C and 1300°C. Some specially designed diffusion tubes can endure even higher temperatures.
- High Purity: The material has very high purity to prevent impurity contamination of semiconductor or photovoltaic materials.
Applications
Diffusion tubes are widely used in the following fields:
- Semiconductor Industry:
- Diffusion Process: Used for doping diffusion, which imparts the required electrical properties to semiconductor materials like silicon wafers.
- Oxidation Process: Used to form oxide layers on the wafer surface, serving as insulation or protective layers.
- Chemical Vapor Deposition (CVD): Conducts vapor deposition at high temperatures to form thin film materials.
- Photovoltaic Industry:
- Silicon Wafer Processing: Utilized in the production of photovoltaic cells for doping, diffusion, and oxidation of silicon wafers to enhance photoelectric conversion efficiency.
- Surface Passivation: Improves the characteristics of silicon wafer surfaces through oxidation or nitridation treatments, reducing surface recombination and enhancing photovoltaic cell performance.
